Products
Cryopumps
SICERA® CP Cryopumps
The energy-saving features in SICERA® Cryopumps make them ideal for semiconductor-related manufacturing.
SICERA® Cryopumps and Compressors are designed with SHI’s proprietary inverter technology to greatly reduce customer energy costs. Our proprietary design also results in longer uptime, while maintaining transparent process conditions. The resulting savings and increased throughput make SICERA® ideal for semiconductor-related manufacturing.
SICERA® KZ-8L Cryopump
Available Configurations
Standard scope of Supply
Specifications
| Pumping Speed | Air | 1,500 liters/second |
|---|---|---|
| Water | 4,000 liters/second | |
| Argon | 1,200 liters/second | |
| Hydrogen | 2,200 liters/second | |
| Throughput | Argon | 8.8 torr-liters/second (700 sccm) |
| Capacity | Argon (at 1×10-6 torr) | 1,000 standard liters |
| Hydrogen (at 5×10-6 torr) | 16 standard liters | |
| Crossover Rating | 150 torr-liters | |
| Cooldown Time | 70 Minutes | |
| Weight | 32 kg (70.6 lbs.) | |
| Dimensions (HxWxD) | 230 x 415 x 615 mm (9.1 x 16.3 x 24.2 in.) |
|
| Maintenance | 12,000 Hours | |
| Inlet Flange | ICF | 253 mm |
Specifications subject to change without notice.
SICERA® KZ-12L Cryopump
Available Configurations
Standard scope of Supply
Specifications
| Pumping Speed | Air | 4,500 liters/second |
|---|---|---|
| Water | 9,500 liters/second | |
| Argon | 3,500 liters/second | |
| Hydrogen | 5,500 liters/second | |
| Throughput | Argon | 11.3 torr-liters/second (900 sccm) |
| Capacity | Argon (at 1×10-6 torr) | 2,000 standard liters |
| Hydrogen (at 5×10-6 torr) | 35 standard liters | |
| Crossover Rating | 150 torr-liters | |
| Cooldown Time | 100 Minutes | |
| Weight | 40 kg (88.2 lbs.) | |
| Dimensions (HxWxD) | 230 x 518 x 689 mm (9.1 x 20.4 x 27.1 in.) |
|
| Maintenance | 12,000 Hours | |
| Inlet Flange | ANSI | 10 in. |
Specifications subject to change without notice.
